Hydrofluoric acid 49%, CMOS, J.T.Baker®

Supplier: AVANTOR PERFORMANCE MATERIAL LLC


Management of Change (MOC) category = R

BAKR9574-89 9574-07 BAKR9574-4X 9574-09 9574-07 BAKR9574-09
JT9574-89EA 3926.22 CAD
JT9574-4X JT9574-9 JT9574-89 JT9574-7 CAJT9574-9 CAJT9574-7
Hydrofluoric acid 49%, CMOS, J.T.Baker®
Hydrofluoric acid
Formula: HF
MW: 20.01 g/mol
MDL Number: MFCD00011346
CAS Number: 7664-39-3
UN: 1790
ADR: 8,II

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Specification Test Results

For Microelectronic Use
Assay (HF) (by acidimetry) 48.8 - 49.2 %
Color (APHA) ≤7
Fluosilicic Acid (H₂SiF₆) ≤50000.0 ppb
Residue after Ignition ≤5 ppm
Chloride (Cl) ≤3 ppm
Nitrate (NO₃) ≤2 ppm
Phosphate (PO₄) ≤0.7 ppm
Sulfate and Sulfite (as SO₄) ≤1000.0 ppb
Trace Impurities - Aluminum (Al) ≤20 ppb
Arsenic and Antimony (as As) ≤10.0 ppb
Trace Impurities - Barium (Ba) ≤10.0 ppb
Trace Impurities - Beryllium (Be) ≤10.0 ppb
Trace Impurities - Bismuth (Bi) ≤20.0 ppb
Trace Impurities - Boron (B) ≤10.0 ppb
Trace Impurities - Cadmium (Cd) ≤10.0 ppb
Trace Impurities - Calcium (Ca) ≤50.0 ppb
Trace Impurities - Chromium (Cr) ≤10.0 ppb
Trace Impurities - Cobalt (Co) ≤10.0 ppb
Trace Impurities - Copper (Cu) ≤10.0 ppb
Trace Impurities - Gallium (Ga) ≤10.0 ppb
Trace Impurities - Germanium (Ge) ≤20 ppb
Trace Impurities - Gold (Au) ≤10.0 ppb
Heavy Metals (as Pb) ≤100 ppb
Trace Impurities - Iron (Fe) ≤50.0 ppb
Trace Impurities - Lead (Pb) ≤10.0 ppb
Trace Impurities - Lithium (Li) ≤10.0 ppb
Trace Impurities - Magnesium (Mg) ≤20 ppb
Trace Impurities - Manganese (Mn) ≤10.0 ppb
Trace Impurities - Molybdenum (Mo) ≤10.0 ppb
Trace Impurities - Nickel (Ni) ≤10.0 ppb
Trace Impurities - Niobium (Nb) ≤10.0 ppb
Trace Impurities - Potassium (K) ≤20.0 ppb
Trace Impurities - Silicon (Si) ≤1000.0 ppb
Trace Impurities - Silver (Ag) ≤10.0 ppb
Trace Impurities - Sodium (Na) ≤50.0 ppb
Trace Impurities - Strontium (Sr) ≤10.0 ppb
Trace Impurities - Tantalum (Ta) ≤10.0 ppb
Trace Impurities - Thallium (Tl) ≤10.0 ppb
Trace Impurities - Tin (Sn) ≤20.0 ppb
Trace Impurities - Titanium (Ti) ≤10.0 ppb
Trace Impurities - Vanadium (V) ≤10.0 ppb
Trace Impurities - Zinc (Zn) ≤20.0 ppb
Trace Impurities - Zirconium (Zr) ≤10.0 ppb
Particle Count at point of fill - 0.5 µm and greater ≤150 par/ml
Particle Count at point of fill - 1.0 µm and greater ≤25 par/ml

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