Buffered oxide etch (20:1) VLSI, with surfactant, J.T.Baker®
Supplier: AVANTOR PERFORMANCE MATERIAL LLC
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Danger
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Management of Change (MOC) category = R
In the Avantor Electronic Materials range, we have solvents, acids and bases in CMOS and Finyte/VLSI quality, as well as Performance Materials like photoresist- and residue-removers, selective etchants, BEOL and FEOL.
Avantor Performance Materials portfolio of production-proven chemistries , customizable chemistry platforms and world-class applications centers are designed to help you meet your process improvement goals faster and speed up your ramp time to the next node.
UN:
2922 ADR: 8 (6.1),II |
Specification Test Results
For Microelectronic Use | |
Ship and store material above 35°F (2°C) | |
Ammonium Fluoride (NH₄F)(w/w) | 37.5 - 38.5 % |
Hydrofluoric Acid (HF)(w/w) | 2.32 - 2.52 % |
Residue after Ignition | ≤10 ppm |
Trace Impurities - Aluminum (Al) | ≤200.0 ppb |
Arsenic and Antimony (as As) | ≤30.0 ppb |
Trace Impurities - Barium (Ba) | ≤1000.0 ppb |
Trace Impurities - Boron (B) | ≤200.0 ppb |
Trace Impurities - Cadmium (Cd) | ≤500.0 ppb |
Trace Impurities - Calcium (Ca) | ≤200.0 ppb |
Trace Impurities - Chromium (Cr) | ≤100.0 ppb |
Trace Impurities - Cobalt (Co) | ≤500.0 ppb |
Trace Impurities - Copper (Cu) | ≤100.0 ppb |
Trace Impurities - Gallium (Ga) | ≤500.0 ppb |
Trace Impurities - Germanium (Ge) | ≤500.0 ppb |
Trace Impurities - Gold (Au) | ≤300.0 ppb |
Heavy Metals (as Pb) | ≤1000.0 ppb |
Trace Impurities - Iron (Fe) | ≤200.0 ppb |
Trace Impurities - Lead (Pb) | ≤300.0 ppb |
Trace Impurities - Lithium (Li) | ≤1000.0 ppb |
Trace Impurities - Magnesium (Mg) | ≤200.0 ppb |
Trace Impurities - Manganese (Mn) | ≤200.0 ppb |
Trace Impurities - Nickel (Ni) | ≤200.0 ppb |
Trace Impurities - Potassium (K) | ≤300.0 ppb |
Trace Impurities - Silver (Ag) | ≤500.0 ppb |
Trace Impurities - Sodium (Na) | ≤300 ppb |
Trace Impurities - Strontium (Sr) | ≤1000.0 ppb |
Trace Impurities - Tin (Sn) | ≤300.0 ppb |
Trace Impurities - Titanium (Ti) | ≤300.0 ppb |
Trace Impurities - Zinc (Zn) | ≤300.0 ppb |
Particle Count - 1.0 µm and greater | ≤25 par/ml |
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