Ethylene glycol ≥99% VLSI, J.T.Baker®

Supplier: AVANTOR PERFORMANCE MATERIAL LLC

Synonyms: 1,2-Ethanediol1,2-Dihydroxy ethaneEthane-1,2-diolGlycol

Management of Change (MOC) category = R

BAKR5387-03 5387-03 BAKR5387-05 5387-05
CAJT5387-5CS 2432.74 CAD
JT5387-3 JT5387-5 CAJT5387-5 CAJT5387-3
Ethylene glycol ≥99% VLSI, J.T.Baker®
Ethylene glycol
Formula: HOCH₂CH₂OH
MW: 62.07 g/mol
Boiling Pt: 196…198 °C (1013 hPa)
Melting Pt: –13 °C
Density: 1.115 g/cm³ (20 °C)
Flash Pt: 116 °C
Storage Temperature: Ambient
MDL Number: MFCD00002885
CAS Number: 107-21-1
Merck Index: 13,03832
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Specification Test Results

For Microelectronic Use
Assay (HOCH₂CH₂OH) (by GC) ≥99.0 %
Color (APHA) ≤10
Acidity (µeq/g) ≤0.8
Water (H₂O)(by Karl Fischer titrn) ≤0.2 %
Chloride (Cl) ≤1 ppm
Arsenic and Antimony (as As) ≤0.100 ppm
Trace Impurities - Iron (Fe) ≤0.2 ppm
Trace Impurities - Aluminum (Al) ≤100.0 ppb
Trace Impurities - Barium (Ba) ≤100.0 ppb
Trace Impurities - Boron (B) ≤50 ppb
Trace Impurities - Calcium (Ca) ≤300 ppb
Trace Impurities - Chromium (Cr) ≤50 ppb
Trace Impurities - Copper (Cu) ≤50 ppb
Trace Impurities - Gold (Au) ≤50 ppb
Trace Impurities - Lead (Pb) ≤200.0 ppb
Trace Impurities - Lithium (Li) ≤100.0 ppb
Trace Impurities - Magnesium (Mg) ≤100.0 ppb
Trace Impurities - Manganese (Mn) ≤100.0 ppb
Trace Impurities - Nickel (Ni) ≤100.0 ppb
Trace Impurities - Potassium (K) ≤300.0 ppb
Trace Impurities - Sodium (Na) ≤800.0 ppb
Trace Impurities - Tin (Sn) ≤100 ppb
Trace Impurities - Titanium (Ti) ≤100.0 ppb
Trace Impurities - Zinc (Zn) ≤400.0 ppb
Particle Count - 0.5 µm and greater ≤130 par/ml
Particle Count - 1.0 µm and greater ≤10 par/ml

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